Microstructure and NO2 sensing properties of Fe2O3 thin films

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	Microstructure and NO2 sensing properties of Fe2O3 thin films
	Matsushima S. ; Kunitsugu S. ; Kobayashi K. ; Okada G.
发表期刊	Journal of the Ceremic Society of Japan
ISSN	0914-5400
	1994
卷号	102 期号:2 页码:185-188
关键词	Fe2o3 Thin Film No2 Gas Sensor Annealing Temperature Microstructure
英文摘要	W-doped Fe2O3 films have been fabricated on polycrystalline alumina substrates by the RF magnetron sputtering method, and effects of annealing temperature on the NO2 sensing properties have been examined. The crystal structure of the obtained film changed from Fe3O4 to α-Fe2O3 after annealing at temperatures of 500 to 500°C in air. An increase in the annealing temperature increased the particle size, resulting in a decrease in the NO2-gas sensitivity. These results suggest that the NO2 sensitivity of W-doped Fe2O3 film depends on the particle size.
文献类型	期刊论文
条目标识符	http://ir.yic.ac.cn/handle/133337/3157
专题	科研共享资源
推荐引用方式 GB/T 7714	Matsushima S.,Kunitsugu S.,Kobayashi K.,et al. Microstructure and NO2 sensing properties of Fe2O3 thin films[J]. Journal of the Ceremic Society of Japan,1994,102(2):185-188.
APA	Matsushima S.,Kunitsugu S.,Kobayashi K.,&Okada G..(1994).Microstructure and NO2 sensing properties of Fe2O3 thin films.Journal of the Ceremic Society of Japan,102(2),185-188.
MLA	Matsushima S.,et al."Microstructure and NO2 sensing properties of Fe2O3 thin films".Journal of the Ceremic Society of Japan 102.2(1994):185-188.

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